| Model | OIS-Two | OIS-Two Plus |
| Dimensions | ψ300mm × 150mm (H) | |
| Grids | ψ17cm three molybdenum grids | |
| Beam Voltage | 100V - 1500V | |
| Max Beam Current | 1200mA | |
| Acc Voltage | 100V - 1000V | |
| Max RF Power | 750W | 1000W |
| Gas Flow Rate | 20sccm - 30sccm (argon) 40sccm - 60sccm (oxygen)） |
|
| Pressure | 5 × 10-2 Pa | |
| Water-cooling | RF coil and beam unit | |
| Neutralizer | ||
| Dimensions | ψ7cm × 12cm | |
| Max Emission Current | 2000mA | 2400mA |
| Max RF Power | 150W | |
| Gas Flow Rate | 5sccm to 10sccm (argon only) | |
| Model | OIS-Three | OIS-Three Plus |
| Dimensions | ψ390mm × 215mm(H) | |
| Grids | ψ23cm three molybdenum grids | |
| Beam Voltage | 100V - 1500V | |
| Max Beam Current | 1800mA | 2400mA |
| Acc Voltage | 100V - 1000V | |
| Max RF Power | 2000W | |
| Gas Flow Rate | 20sccm - 40sccm (argon) 40sccm - 80sccm (oxygen) |
|
| Pressure | 5 × 10-2 Pa | |
| Water-cooling | RF coil and beam unit | |
| Neutralizer | ||
| Dimensions | ψ7cm × 12cm | |
| Max Emission Current | 2800mA | 3000mA |
| Max RF Power | 150W | |
| Gas Flow Rate | 5sccm to 10sccm (argon only) | |
| Dimensions | ψ224mm ×143mm (H)) |
| Grids | ψ10cm three molybdenum grids |
| Beam Voltage | 100V - 1500V |
| Max Beam Current | 500mA |
| Acc Voltage | 100V - 1000V |
| Max RF Power | 600W |
| Gas Flow Rate | 25sccm - 35sccm (oxygen) 10sccm - 20sccm (argon) |
| Pressure | 5 × 10-2 Pa |
| Water-cooling | RF coil and main unit |
| Neutralizer | |
| Dimensions | ψ6cm × 8cm |
| Max Emission Current | 1500mA |
| Max RF Power | 150W |
| Gas Flow Rate | 5sccm to 8sccm (argon only) |
| Neutralizer | RFN-3A |
| Emission | 3000mA |
| Max RF Power | 150W |
| Controller | OIS-ESC |
| Neutralizer DC | OISN-Ⅱ |
| Neutralizer RF | AX300Ⅲ (300W) |
| Model | OIS-GL |
| Size | ψ163mm × 200mm (H) |
| Discharge voltage | 50V - 300V |
| Discharging current (max) | 8A |
| Gas flow rate | 5sccm - 50sccm（ argon） 10sccm - 100sccm（ oxygen） |
| Pressure | 3.5 × 10-2 Pa or lower |
| Warter-cooling | Anode and beam unit |
| Neutralizer | Tungsten (W) filament |
| Source voltage | AC 100 V ± 15 ％ |
| Bias Power (inside) | 0 to ± 60 V/0.5 A |
| Standard measurement range | ± 199.99 mA to ± 1.9999 mA |
| Accessories | Gauge head, Cable, Feedthrough |
| Standard gauge head | ψ30 mm (ψ8 mm, Measurement plane), 10 pcs |
| Scanning points | 32 points |
| Measurements | 480 × 99 × 330 mm |
