| Chamber Size | □ 1000 mm × H1165 mm |
| Substrate Dome | ψ870 mm |
| Max. Dome Rotation Speed | 10 - 30 rpm |
| Crystal Flim Thicness Monitor | 6 point rotary sensor |
| Ion Source | Reactive Plasma Source |
| Performance | |
| Ultimate Pressure | 1.0E-4 Pa or lower |
| Pumping Speed | 20 min (from atmospheric pressure to 1.3 × 10-3 Pa） |
| Utility Requirements | |
| Installation Space | 4000 mm (W) × 6000 mm (D) × 2800 mm (H) approx. |
| Power Source | 3-phase, 200 V ± 5%, 75 kVA, approx. |
| Minimum Water Flow | 80lmin or greater |
| Air Pressure | 0.5 MPa - 0.7 MPa |
| Weight | 4000 kg approx. |
| Chamber Size | □ 1300 mm × H1460 mm |
| Substrate Dome | ψ1180 mm |
| Max. Dome Rotation Speed | 10 - 30 rpm |
| Crystal Flim Thicness Monitor | 6 point rotary sensor |
| Ion Source | Reactive Plasma Source |
| Performance | |
| Ultimate Pressure | 7.0E-5 Pa or lower |
| Pumping Speed | 10 min (from atmospheric pressure to 3.0 × 10-3 Pa） |
| Utility Requirements | |
| Installation Space | 5300 mm (W) × 6500 mm (D) × 3500 mm (H) approx. |
| Power Source | 3-phase, 200 V ± 5%, 85 kVA, approx. |
| Minimum Water Flow | 120lmin or greater |
| Air Pressure | 0.5 MPa - 0.7 MPa |
| Weight | 4000 kg approx. |
