| Vacuum chamber (3 chamber type) |
Load chamber + Deposition chamber + Unload chamber (Selectable loading/unloading type) |
| Vacuum load/unload chambers (2 chambers) |
SUS 304, 1500mm (L) × 1500mm (D) × 1560mm (H) approx. |
| Deposition chamber (w/ 2 gate valves) |
SUS 304, 1500mm (L) × 1500mm (D) × 1560mm (H) approx. |
| Ultimate vacuum pressure | ≤1.5 × 10-4 Pa |
| Ultimate evacuation time in countinuous runs |
≤5 - 10 min (7.0 × 10-3 Pa) |
| Substrate dome | ψ 1200 mm |
| Rotational speed | 5 - 20 rpm |
| Evaporator (two sources) | Electron gun (w/automatic source material feeding system) |
| RF ion source | ψ 17cm |
| Utility Requirements | |
| Power Requirements | 3phase+G、200V ± 5％、140kVA approx.、50/60Hz |
| Cooling Water Flow Rate | ≥200lmin each of 3 inlets |
| Gross Weight | 25000 kg approx. |
