| Model | OTFC-900CBI/DBI |
| Vacuum Chamber | SUS304, ψ900mm × 1300mm (H) |
| supstrate Dome Size | ψ790mm |
| supstrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 10cm RF Ion Source |
| Vacuum System | Roughing Pump, Diffusion Pump + Polycold Or Cryo Pump + Cryo Trap |
| Performance | |
| Ultimate Pressure | 7.0 × 10-5 Pa or lower |
| Pump Down Rate | 15 min (Atm. to 1.3 × 10-3 Pa) |
| supstrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 4500mm (W) × 5500mm (D) × 3200mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 80kVA approx. |
| Cooling Water Flow Rate | 80lmin or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 5400kg approx. |
| Model | OTFC-1100CBI/DBI |
| Vacuum Chamber | SUS304, ψ1100mm × 1520mm (H) |
| supstrate Dome Size | ψ950mm |
| supstrate Dome Rotation Speed | 10 rpm to 50 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 17cm RF Ion Source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap |
| Performance | |
| Ultimate Pressure | 7.0 × 10-5 Pa or lower |
| Pump Down Rate | 15 min (Atm. to 1.3 × 10-3 Pa) |
| supstrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5000mm (W) × 6000mm (D) × 3300mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 100kVA approx. |
| Cooling Water Flow Rate | 120lmin or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 7200kg approx. |
| Model | OTFC-1300CBI/DBI |
| Vacuum Chamber | SUS304, ψ1300mm × 1610mm (H) |
| supstrate Dome Size | ψ1180mm |
| supstrate Dome Rotation Speed | 10 rpm to 50 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 17cm RF Ion Source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap |
| Performance | |
| Ultimate Pressure | 7.0 × 10-5 Pa or lower |
| Pump Down Rate | 15 min (Atm. to 1.3 × 10-3 Pa) |
| supstrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5000mm (W) × 6500mm (D) × 3500mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 100kVA approx. |
| Cooling Water Flow Rate | 140lmin. or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 8500kg approx. |
| Model | OTFC-1550CBI/DBI |
| Vacuum Chamber | SUS304, ψ1550mm × 1800mm (H) |
| supstrate Dome Size | ψ1460mm |
| supstrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 17cm RF Ion Source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap |
| Performance | |
| Ultimate Pressure | 7.0 × 10-5 Pa or lower |
| Pump Down Rate | 15 minutes (Atm. to 1.3 × 10-3 Pa) |
| supstrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5500mm (W) × 7200mm (D) × 3700mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 120kVA approx. |
| Cooling Water Flow Rate | 180lmin or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 10000kg approx. |
| Model | OTFC-1800CBI/DBI |
| Vacuum Chamber | SUS304, ψ1800mm × 1920mm (H) |
| supstrate Dome Size | ψ1600mm |
| supstrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 23cm RF Ion Source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps |
| Performance | |
| Ultimate Pressure | 7.0 × 10-5 Pa or lower |
| Pump Down Rate | 20 min (Atm. to 1.3 × 10-3 Pa) |
| supstrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5700mm (W) × 7700mm (D) × 4000mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 150kVA approx. |
| Cooling Water Flow Rate | 180lmin or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 11200kg approx. |
